Journal of Microelectromechanical Systems

期刊简介：The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.

【译文】感兴趣的课题包括但不限于：从微米到毫米大小的设备、与IC兼容的制造技术、其他制造技术、微观现象的测量、理论结果、新材料和设计、微型执行器、微型机器人、微型电池、轴承、磨损、可靠性、电气互连、微型遥操作以及适用于MEMS的标准。在流体力学、光学、生物医学工程等领域中的应用实例和应用导向的设备也是关注的中心。