Journal of Micro/Nanolithography MEMS and MOEMS

期刊简介：The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) publishes peer-reviewed papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, microelectromechanical systems, micro-optoelectromechanical systems, and photonics industries.

【译文】《微纳光刻、MEMS和MOEMS杂志》（JM3）发表同行评审的论文，涉及光刻、制造、封装和集成技术，这些技术对于满足电子、微机电系统、微光机电系统和光子工业的需求至关重要。