Microsystems & Nanoengineering

期刊简介：Microsystems & Nanoengineering publishes original research articles and reviews in the latest aspects of Micro and Nano Electro Mechanical Systems (MEMS/NEMS) and nanoengineering relevant to MEMS/NEMS. The journal will cover new design (theory, modelling and simulation), fabrication, characterization, reliability, and applications of devices and systems in micro and nano scales. Nano-engineered MEMS/NEMS will be also within the scope of publication in this journal.

【译文】该期刊发表关于微纳米机电系统（MEMS/NEMS）和纳米工程最新方面的原创研究文章和评论。期刊将涵盖微纳米尺度设备与系统的设计（理论、建模和仿真）、制造、表征、可靠性和应用。