IEEE Transactions on Semiconductor Manufacturing

期刊简介：The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.

【译文】IEEE半导体制造交易期刊针对制造复杂微电子组件的挑战性问题进行探讨，特别是超大规模集成电路（VLSI）。制造这些产品需要精确的微图案化、精确控制材料特性、超洁净的工作环境和化学、物理、电学和机械过程的复杂相互作用。