Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

期刊简介：Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.

【译文】《真空科学与技术B》期刊强调与微米和纳米结构和器件相关的加工、测量和现象。加工可能包括真空加工、等离子体加工和微光刻等，而测量则涉及广泛的材料和器件表征方法，以理解亚微米和纳米结构和器件的物理和化学。